First domestic 12 inch mass production equipment
High precise beam combination technology and modulation technology for Multi- laser
Rectangular Top-hat beam with large size, high productivity
Energy density accuracy down to 5mJ/cm2
| Item | LA2250G |
| Laser wavelength | 532nm |
| Wafer size | 12 inch |
| Energy Density accuracy | 5mJ/cm2 |
| Uniformity of beam top | ≤1% |
| Focal depth range | 5mm |
| Process Effect | Crystallization and void elimination |
