First domestic green laser machine for mass pruduction
High reliability and stability
Independly developped Optical system, LIET technology with IP
Green/UV laser two wavelengths are optional
Item | LA2515UV | LA2540/2550S |
Wafer Size | 6 inch,8 inch | |
Spot size | X:100~500μm | Y:100~500μm |
Max. laser energy density | Green:10J/cm2 | UV:6J/cm2 |
Specific contact resistance | ~10-5Ω·cm2 | |
Oxygen control | ≤10ppm |