High reliability and stability
Independly developped Optical system
Excellent thermal budget control
50μm ultra-thin TaiKo wafer handling capability
Item | LA2540S | LA2550S | LA2540D | LA2550D |
Wafer size | 6 inch, 8 inch, 12 inch | |||
Laser power | 60W*2 | 90W*2 | 60W*2+300W | 90W*2+300W |
Laser energy density | ≥5J/cm2×2 | |||
Activation efficiency | ≥95%@B+ | ≥90%@P+ | ||
RS non-uniformity | WIW:≤1%@3sigma | WTW:≤1%@3sigma |